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Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
60.60 Standard published
Corrigendum 1 - Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 13: Bend - and shear - type test methods of measuring adhesive strength for MEMS structures
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 14: Forming limit measuring method of metallic film materials
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films - Wafer curvature and cantilever beam deflection methods
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 18: Bend testing methods of thin film materials
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 19: Electronic compasses
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 22: Electromechanical tensile test method for conductive thin films on flexible substrates
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 25: Silicon based MEMS fabrication technology - Measurement method of pull-press and shearing strength of micro bonding area
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 27: Bond strength test for glass frit bonded structures using micro-chevron-tests (MCT)
60.60 Standard published
