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ISO/TS 25138:2010

Surface chemical analysis — Analysis of metal oxide films by glow-discharge optical-emission spectrometry

Publication date:   Nov 22, 2010

95.99 Withdrawal of Standard   Aug 6, 2019

General information

95.99 Withdrawal of Standard   Aug 6, 2019

ISO

ISO/TC 201/SC 8 Glow discharge spectroscopy

Technical Specification

71.040.40   Chemical analysis

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Scope

ISO/TS 25138:2010 describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.
The method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn and Al. Other elements that can be determined by the method are O, C, N, H, P and S.

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ISO/TS 25138:2010
95.99 Withdrawal of Standard
Aug 6, 2019

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ISO/TS 25138:2019