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ISO/TS 25138:2019

Surface chemical analysis — Analysis of metal oxide films by glow-discharge optical-emission spectrometry ISO/TS 25138:2019

Publication date:   Aug 6, 2019

General information

90.92 Standard to be revised   Sep 29, 2023

ISO

ISO/TC 201/SC 8 Glow discharge spectroscopy

Technical Specification

71.040.40   Chemical analysis

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Scope

This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.
This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.

Life cycle

PREVIOUSLY

WITHDRAWN
ISO/TS 25138:2010

NOW

PUBLISHED
ISO/TS 25138:2019
90.92 Standard to be revised
Sep 29, 2023

REVISED BY

IN_DEVELOPMENT
ISO/DTS 25138