ISO/TS 22933:2022

Name: ISO/TS 22933:2022
Brand: ISO
SKU: ISO/TS 22933:2022
Price: 116.16 EUR
Availability: InStock
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Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS

Publication date: Apr 1, 2022

General information

Current stage: 60.60 Standard published Apr 1, 2022

Originator: ISO

Owner: ISO/TC 201/SC 6 Secondary ion mass spectrometry

Type: Technical Specification

ICS: 71.040.40 Chemical analysis

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Status: Published

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Languages: English

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Scope

This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.

Life cycle

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PUBLISHED
ISO/TS 22933:2022
60.60 Standard published
Apr 1, 2022