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ISO/TS 22933:2022

Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS ISO/TS 22933:2022

Publication date:   Apr 1, 2022

General information

60.60 Standard published   Apr 1, 2022

ISO

ISO/TC 201/SC 6 Secondary ion mass spectrometry

Technical Specification

71.040.40   Chemical analysis

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This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.

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PUBLISHED
ISO/TS 22933:2022
60.60 Standard published
Apr 1, 2022