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ISO/AWI TS 22933

Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS ISO/AWI TS 22933

General information

10.99   New project approved   Nov 15, 2025

ISO

ISO/TC 201/SC 6 Secondary ion mass spectrometry

Technical Specification

Scope

This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.

Life cycle

PREVIOUSLY

PUBLISHED
ISO/TS 22933:2022

NOW

IN_DEVELOPMENT
ISO/AWI TS 22933
10.99 New project approved
Nov 15, 2025




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