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Surface chemical analysis — Secondary-ion mass spectrometry — Method for depth profiling of arsenic in silicon
90.93 Standard confirmed
Surface chemical analysis — Mass spectrometries — Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
60.60 Standard published
Surface chemical analysis — Secondary-ion mass spectrometry — Determination of boron atomic concentration in silicon using uniformly doped materials
90.93 Standard confirmed
Surface chemical analysis — Secondary-ion mass spectrometry — Method for depth profiling of boron in silicon
90.93 Standard confirmed
Surface chemical analysis — Secondary ion mass spectrometry — Linearity of intensity scale in single ion counting time-of-flight mass analysers
60.60 Standard published
Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials
90.60 Close of review
Surface chemical analysis — Secondary-ion mass spectrometry — Method for estimating depth resolution parameters with multiple delta-layer reference materials
90.93 Standard confirmed
Surface chemical analysis — Secondary ion mass spectrometry — Correction method for saturated intensity in single ion counting dynamic secondary ion mass spectrometry
90.92 Standard to be revised
Surface chemical analysis — Secondary ion mass spectrometry — Method for determining yield volume in argon cluster sputter depth profiling of organic materials
90.93 Standard confirmed
Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS
90.92 Standard to be revised
Surface chemical analysis — Secondary-ion mass spectrometry — Method for depth calibration for silicon using multiple delta-layer reference materials
90.93 Standard confirmed
Surface chemical analysis — Secondary-ion mass spectrometry — Repeatability and constancy of the relative-intensity scale in static secondary-ion mass spectrometry
90.93 Standard confirmed
Surface chemical analysis — Secondary ion mass spectrometry — Correction method for saturated intensity in single ion counting dynamic secondary ion mass spectrometry
40.20 DIS ballot initiated: 12 weeks
Machine Learning Application to Surface Analysis Data. Part I: Mass Spectrum and Imaging
00.60 Close of review
Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS
10.99 New project approved
