ISO 16700:2004

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification ISO 16700:2004

Publication date:   Mar 5, 2004

Scope

ISO 16700:2004 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.