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ISO 16700:2016

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification ISO 16700:2016

Publication date:   Jul 18, 2016

General information

90.93 Standard confirmed   Nov 23, 2023

ISO

ISO/TC 202/SC 4 Scanning electron microscopy

International Standard

37.020   Optical equipment

Buying

Published

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Scope

ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.

Life cycle

PREVIOUSLY

WITHDRAWN
ISO 16700:2004

NOW

PUBLISHED
ISO 16700:2016
90.93 Standard confirmed
Nov 23, 2023

REVISED BY

IN_DEVELOPMENT
ISO/PWI 16700