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Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
90.93 Standard confirmed
Microbeam analysis — Scanning electron microscopy — Method for evaluating critical dimensions by CD-SEM
60.60 Standard published
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
00.00 Proposal for new project received
Microbeam analysis — Scanning electron microscopy — Tagged image file format for scanning electron microscopy(TIFF/SEM)
00.99 Approval to ballot proposal for new project
Microbeam analysis — Scanning electron microscopy — Qualification of the scanning electron microscope for quantitative measurements
90.20 Standard under periodical review
Microbeam analysis — Scanning electron microscopy — Methods of evaluating image sharpness
90.93 Standard confirmed
