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Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
90.93 Standard confirmed
Microbeam analysis — Scanning electron microscopy — Qualification of the scanning electron microscope for quantitative measurements
90.60 Close of review
Microbeam analysis — Scanning electron microscopy — Method for evaluating critical dimensions by CD-SEM
90.93 Standard confirmed
Microbeam analysis — Scanning electron microscopy — Methods of evaluating image sharpness
90.93 Standard confirmed
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
00.00 Proposal for new project received
Microbeam analysis — Scanning electron microscopy — Tagged image file format for scanning electronmicroscopy (TIFF/SEM)
20.00 New project registered in TC/SC work programme
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating pixel size on digital image of SEM and FIB-SEM
10.20 New project ballot initiated
