ISO/TS 21383:2021

Microbeam analysis — Scanning electron microscopy — Qualification of the scanning electron microscope for quantitative measurements ISO/TS 21383:2021

Publication date:   Mar 12, 2021

General information

90.60 Close of review   Jun 4, 2024


ISO/TC 202/SC 4 Scanning electron microscopy

Technical Specification

37.020   Optical equipment



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This document describes methods to qualify the scanning electron microscope with the digital imaging system for quantitative and qualitative SEM measurements by evaluating essential scanning electron microscope performance parameters to maintain the performance after installation of the instruments. The items and evaluating methods of the performance parameters are selected by users for their own purposes.

Life cycle


ISO/TS 21383:2021
90.60 Close of review
Jun 4, 2024