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EN 62374-1:2010

Semiconductor devices - Part 1: Time-dependent dielectric breakdown (TDDB) test for inter-metal layers EN 62374-1:2010

Publication date:   Jan 21, 2011

General information

60.60 Standard published   Nov 19, 2010

CENELEC

CLC/SR 47 Semiconductor devices

European Norm

31.080   Semiconductor devices

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Scope

IEC 62374-1:2010 describes a test method, test structure and lifetime estimation method of the time-dependent dielectric breakdown (TDDB) test for inter-metal layers applied in semiconductor devices.

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PUBLISHED
EN 62374-1:2010
60.60 Standard published
Nov 19, 2010

CORRIGENDA / AMENDMENTS

PUBLISHED
EN 62374-1:2010/AC:2011