IEC 62047-55 ED1

Micro-electromechanical devices - Part 55: Silicon based MEMS fabrication technology - Test method of microstructure pendulum impact

General information

20.99 WD approved for registration as CD   Jul 5, 2024

CD    Jan 24, 2025

IEC

TC 47/SC 47F

International Standard

31.080.99   Other semiconductor devices

Life cycle

NOW

IN_DEVELOPMENT
IEC 62047-55 ED1
20.99 WD approved for registration as CD
Jul 5, 2024