IEC 62047-54 ED1

Micro-electromechanical devices - Part 54: Silicon based MEMS fabrication technology - Test method of microstructure tensile

Current stage: 20.99 WD approved for registration as CD Jul 5, 2024

Next stage: CD Next stage date : Jan 24, 2025

Originator: IEC

Type: International Standard

ICS: 31.080.99 Other semiconductor devices

IN_DEVELOPMENT
IEC 62047-54 ED1
20.99 WD approved for registration as CD
Jul 5, 2024