ISO/TS 25138:2019

Surface chemical analysis — Analysis of metal oxide films by glow-discharge optical-emission spectrometry

Publication date:   Aug 6, 2019

95.99   Withdrawal of Standard   Feb 20, 2025

General information

95.99   Withdrawal of Standard   Feb 20, 2025

ISO

ISO/TC 201/SC 8 Glow discharge spectroscopy

Technical Specification

71.040.40   Chemical analysis

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Scope

This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.
This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.

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PREVIOUSLY

WITHDRAWN
ISO/TS 25138:2010

NOW

WITHDRAWN
ISO/TS 25138:2019
95.99 Withdrawal of Standard
Feb 20, 2025

REVISED BY

PUBLISHED
ISO/TS 25138:2025