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ISO/TS 21383:2021

Microbeam analysis — Scanning electron microscopy — Qualification of the scanning electron microscope for quantitative measurements

Publication date:   Mar 12, 2021

General information

90.20 Standard under periodical review   Jan 15, 2024

ISO

ISO/TC 202/SC 4 Scanning electron microscopy

Technical Specification

37.020   Optical equipment

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Scope

This document describes methods to qualify the scanning electron microscope with the digital imaging system for quantitative and qualitative SEM measurements by evaluating essential scanning electron microscope performance parameters to maintain the performance after installation of the instruments. The items and evaluating methods of the performance parameters are selected by users for their own purposes.

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PUBLISHED
ISO/TS 21383:2021
90.20 Standard under periodical review
Jan 15, 2024