ISO 25498:2018

Microbeam analysis — Analytical electron microscopy — Selected area electron diffraction analysis using a transmission electron microscope

Publication date:   Mar 16, 2018

General information

90.92 Standard to be revised   Sep 12, 2023

ISO

ISO/TC 202/SC 3 Analytical electron microscopy

International Standard

71.040.50   Physicochemical methods of analysis

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Scope

ISO 25498:2018 specifies the method of selected area electron diffraction (SAED) analysis using a transmission electron microscope (TEM) to analyse thin crystalline specimens. This document applies to test areas of micrometres and sub-micrometres in size. The minimum diameter of the selected area in a specimen which can be analysed by this method is restricted by the spherical aberration coefficient of the objective lens of the microscope and approaches several hundred nanometres for a modern TEM.
When the size of an analysed specimen area is smaller than that restriction, this document can also be used for the analysis procedure. But, because of the effect of spherical aberration, some of the diffraction information in the pattern can be generated from outside of the area defined by the selected area aperture. In such cases, the use of microdiffraction (nano-beam diffraction) or convergent beam electron diffraction, where available, might be preferred.
ISO 25498:2018 is applicable to the acquisition of SAED patterns from crystalline specimens, indexing the patterns and calibration of the diffraction constant.

Life cycle

PREVIOUSLY

WITHDRAWN
ISO 25498:2010

NOW

PUBLISHED
ISO 25498:2018
90.92 Standard to be revised
Sep 12, 2023

REVISED BY

IN_DEVELOPMENT
ISO/DIS 25498