60.60 Standard published Apr 23, 2021
ISO
ISO/TC 202/SC 3 Analytical electron microscopy
International Standard
71.040.50 Physicochemical methods of analysis
This document specifies a determination procedure of energy resolution in the scanning transmission electron microscope or the transmission electron microscope equipped with the electron energy loss (EEL) spectrometer.
This document is applicable to both in-column type EEL spectrometer and post-column type EEL spectrometer. These EEL signal detecting systems are applicable to a parallel detecting system and a serial detecting system.
PUBLISHED
ISO 23420:2021
60.60
Standard published
Apr 23, 2021