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ISO 23420:2021

Microbeam analysis — Analytical electron microscopy — Method for the determination of energy resolution for electron energy loss spectrum analysis ISO 23420:2021

Publication date:   Apr 23, 2021

General information

60.60 Standard published   Apr 23, 2021

ISO

ISO/TC 202/SC 3 Analytical electron microscopy

International Standard

71.040.50   Physicochemical methods of analysis

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This document specifies a determination procedure of energy resolution in the scanning transmission electron microscope or the transmission electron microscope equipped with the electron energy loss (EEL) spectrometer.
This document is applicable to both in-column type EEL spectrometer and post-column type EEL spectrometer. These EEL signal detecting systems are applicable to a parallel detecting system and a serial detecting system.

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PUBLISHED
ISO 23420:2021
60.60 Standard published
Apr 23, 2021