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ISO 18118:2024

Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials ISO 18118:2024

Publication date:   Feb 28, 2024

General information

60.60 Standard published   Feb 28, 2024

ISO

ISO/TC 201/SC 7 Electron spectroscopies

International Standard

71.040.40   Chemical analysis

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Scope

This document gives guidance on the measurement and use of experimentally-determined relative sensitivity factors for the quantitative analysis of homogeneous materials by Auger electron spectroscopy and X-ray photoelectron spectroscopy. The methods described only apply to polycrystalline and amorphous materials, as effects inherent to single-crystal samples are not addressed.

Life cycle

PREVIOUSLY

WITHDRAWN
ISO 18118:2015

NOW

PUBLISHED
ISO 18118:2024
60.60 Standard published
Feb 28, 2024