60.60 Standard published Jun 7, 2024
ISO
ISO/TC 202/SC 2 Electron probe microanalysis
International Standard
71.040.50 Physicochemical methods of analysis
This document gives general guidelines for the determination of experimental parameters relating to the electron probe, the wavelength spectrometer, and the specimen that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of probe current, probe diameter, dead time, wavelength resolution, background, analysis area, analysis depth, and analysis volume.
This document is applicable for the analysis of a well-polished specimen using normal beam incidence.
This document does not apply to energy dispersive X-ray spectroscopy.
WITHDRAWN
ISO 14594:2014
PUBLISHED
ISO 14594:2024
60.60
Standard published
Jun 7, 2024