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ISO 14594:2014

Microbeam analysis — Electron probe microanalysis — Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy ISO 14594:2014

Publication date:   Oct 21, 2014

General information

90.92 Standard to be revised   Aug 10, 2020

ISO

ISO/TC 202/SC 2 Electron probe microanalysis

International Standard

71.040.50   Physicochemical methods of analysis

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Scope

ISO 14594:2014 gives the general guidelines for the determination of experimental parameters relating to the primary beam, the wavelength spectrometer, and the sample that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of beam current, current density, dead time, wavelength resolution, background, analysis area, analysis depth, and analysis volume.
It is intended for the analysis of a well-polished sample using normal beam incidence, and the parameters obtained can only be indicative for other experimental conditions.
It is not designed to be used for energy dispersive X-ray spectroscopy.

Life cycle

PREVIOUSLY

WITHDRAWN
ISO 14594:2003

WITHDRAWN
ISO 14594:2003/Cor 1:2009

NOW

PUBLISHED
ISO 14594:2014
90.92 Standard to be revised
Aug 10, 2020

REVISED BY

IN_DEVELOPMENT
ISO 14594