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ISO 13084:2018

Surface chemical analysis — Secondary ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer

Publication date:   Nov 15, 2018

General information

90.92 Standard to be revised   Sep 16, 2024

ISO

ISO/TC 201/SC 6 Secondary ion mass spectrometry

International Standard

71.040.40   Chemical analysis

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Scope

This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.

Life cycle

PREVIOUSLY

WITHDRAWN
ISO 13084:2011

NOW

PUBLISHED
ISO 13084:2018
90.92 Standard to be revised
Sep 16, 2024

REVISED BY

IN_DEVELOPMENT
ISO/CD 13084