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IEC 62047-49 ED1

Semiconductor devices - Micro-electromechanical devices - Part 49: Temperature and humidity test methods for piezoelectric MEMS cantilevers

General information

40.60 Close of voting   Nov 22, 2024

IEC

TC 47/SC 47F

International Standard

31.080.99   Other semiconductor devices

Life cycle

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IEC 62047-49 ED1
40.60 Close of voting
Nov 22, 2024