IEC 62047-46 ED1

Semiconductor devices - Micro-electromechanical devices - Part 46: Silicon based MEMS fabrication technology - Measurement method of tensile strength of nanoscale thickness membrane

Current stage: 50.00 Final text received or FDIS registered for formal approval Apr 29, 2024

Next stage: CFDIS Next stage date : Jul 22, 2024

Originator: IEC

Type: International Standard

ICS: 31.080.99 Other semiconductor devices

IN_DEVELOPMENT
IEC 62047-46 ED1
50.00 Final text received or FDIS registered for formal approval
Apr 29, 2024