IEC 62047-32:2019 ED1

Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators

Publication date:   Jan 24, 2019

General information

60.60   Standard published   Jan 24, 2019

IEC

TC 47/SC 47F

International Standard

31.080.99   Other semiconductor devices

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Scope

IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.

Life cycle

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PUBLISHED
IEC 62047-32:2019 ED1
60.60 Standard published
Jan 24, 2019