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IEC 62047-32:2019 ED1

Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators IEC 62047-32:2019 ED1

Publication date:   Jan 24, 2019

General information

60.60   Standard published   Jan 24, 2019

IEC

TC 47/SC 47F

International Standard

31.080.99   Other semiconductor devices

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Scope

IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.

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PUBLISHED
IEC 62047-32:2019 ED1
60.60 Standard published
Jan 24, 2019




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