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IEC 62047-30:2017 ED1

Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film IEC 62047-30:2017 ED1

Publication date:   Sep 15, 2017

General information

60.60 Standard published   Sep 15, 2017

IEC

TC 47/SC 47F

International Standard

31.080.99   Other semiconductor devices | 31.140   Piezoelectric devices

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IEC 62047-30:2017(E) specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process

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IEC 62047-30:2017 ED1
60.60 Standard published
Sep 15, 2017