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EN 62374:2007

Semiconductor devices - Time Dependent Dielectric Breakdown (TDDB) test for gate dielectric films EN 62374:2007

Publication date:   Apr 30, 2008

General information

60.60 Standard published   Oct 19, 2007

CENELEC

CLC/TC 47X

European Norm

31.080   Semiconductor devices

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Provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure

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PUBLISHED
EN 62374:2007
60.60 Standard published
Oct 19, 2007