IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices.
This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.
WITHDRAWN
EN 62047-1:2006
PUBLISHED
EN 62047-1:2016
60.60
Standard published
Apr 8, 2016