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EN 62047-1:2016

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions EN 62047-1:2016

Publication date:   Jul 18, 2016

General information

60.60 Standard published   Apr 8, 2016

CENELEC

CLC/SR 47F Micro-electromechanical systems

European Norm

31.080.99   Other semiconductor devices

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Scope

IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices.
This edition includes the following significant technical changes with respect to the previous edition:

a) removal of ten terms;

b) revision of twelve terms;

c) addition of sixteen new terms.

Life cycle

PREVIOUSLY

WITHDRAWN
EN 62047-1:2006

NOW

PUBLISHED
EN 62047-1:2016
60.60 Standard published
Apr 8, 2016