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EN 62047-1:2006

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions EN 62047-1:2006

Publication date:   Dec 27, 2006

General information

99.60   Withdrawal effective   Feb 10, 2019

CENELEC

CLC/SR 47 Semiconductor devices

European Norm

31.080.99   Other semiconductor devices

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Scope

This part of EN 62047 defines terms for micro-electromechanical devices including the process of production of such devices.

Life cycle

NOW

WITHDRAWN
EN 62047-1:2006
99.60 Withdrawal effective
Feb 10, 2019

REVISED BY

PUBLISHED
EN 62047-1:2016

Relations

Adopted from IEC 62047-1:2005 IDENTICAL




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