ISO 21360-6:2023

Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps ISO 21360-6:2023

General information

Current stage: 60.60 Standard published Dec 6, 2023

Originator: ISO

Owner: ISO/TC 112 Vacuum technology

Type: International Standard

ICS: 23.160 Vacuum technology

Scope

This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps.
It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.

Life cycle

NOW

PUBLISHED
ISO 21360-6:2023
60.60 Standard published
Dec 6, 2023