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Vacuum gauges — Definitions and specifications for quadrupole mass spectrometers
90.93 Standard confirmed
Vapour vacuum pumps — Measurement of performance characteristics — Part 1: Measurement of volume rate of flow (pumping speed)
90.92 Standard to be revised
Vapour vacuum pumps — Measurement of performance characteristics — Part 2: Measurement of critical backing pressure
90.92 Standard to be revised
Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for Pirani gauges
90.93 Standard confirmed
Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges
90.93 Standard confirmed
Vacuum technology — Vacuum gauges — Characterization of quadrupole mass spectrometers for partial pressure measurement
90.93 Standard confirmed
Vacuum technology — Vacuum gauges — Procedures to measure and report outgassing rates
90.93 Standard confirmed
Vacuum technology — Right-angle valve — Dimensions and interfaces for pneumatic actuator
60.60 Standard published
Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 1: General description
60.60 Standard published
Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 2: Positive displacement vacuum pumps
60.60 Standard published
Vacuum technology — Standard methods for measuring vacuum pump performance — Part 3: Specific parameters for mechanical booster vacuum pumps
90.93 Standard confirmed
Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 4: Turbomolecular vacuum pumps
90.92 Standard to be revised
Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 5: Non-evaporable getter (NEG) vacuum pumps
60.60 Standard published
Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps
60.60 Standard published
Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for spinning rotor gauges
90.92 Standard to be revised
Vacuum technology — Turbomolecular pumps — Measurement of rapid shutdown torque
90.93 Standard confirmed
Vacuum technology — Vacuum gauges — Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge
90.92 Standard to be revised
