ISO 14291:2012

Vacuum gauges — Definitions and specifications for quadrupole mass spectrometers ISO 14291:2012

Publication date:   Jul 6, 2012

General information

90.93 Standard confirmed   Mar 6, 2023


ISO/TC 112 Vacuum technology

International Standard

23.160   Vacuum technology



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ISO 14291:2012 defines terms relevant to quadrupole mass spectrometers (QMSs) and specifies the parameters required for specification by QMS manufacturers necessary for proper calibration and for maintaining the quality of partial pressure measurement.
ISO 14291:2012 applies to QMSs with an ion source of the electron impact ionization type. Such QMSs are designed for the measurement of atomic mass-to-charge ratios m/z typically <300. QMSs with other ion sources, such as those of the chemical ionization, photoionization, and field ionization types, as well as the measurements of m/z above 300, which are mainly used to specify organic materials, lie outside the scope of ISO 14291:2012.

Life cycle


ISO 14291:2012
90.93 Standard confirmed
Mar 6, 2023