prEN IEC 63567-1:2025

Name: prEN IEC 63567-1:2025
Brand: CENELEC
SKU: prEN IEC 63567-1:2025
Price: 23.92 EUR
Availability: InStock
Rating: 5 (82 reviews)

Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 1: Transmittance evaluation method of EUV pellicle

Publication date: Dec 19, 2025

General information

Current stage: 40.60 Close of voting Mar 13, 2026

Originator: CENELEC

Owner: CLC/TC 47X

Type: European Norm

ICS: 31.080.99 Other semiconductor devices

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Status: Draft

PDF - €23.92

Languages: English

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prEN IEC 63567-1:2025
40.60 Close of voting
Mar 13, 2026