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prEN IEC 63567-1:2025

Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 1: Transmittance evaluation method of EUV pellicle prEN IEC 63567-1:2025

Publication date:   Dec 19, 2025

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40.60   Close of voting   Mar 13, 2026

CENELEC

CLC/TC 47X

European Norm

31.080.99   Other semiconductor devices

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prEN IEC 63567-1:2025
40.60 Close of voting
Mar 13, 2026




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