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prEN IEC 63567-1

Semiconductor devices - Performance evaluation of semiconductor components and equipment - Part 1: Transmittance evaluation method of euv pellicle prEN IEC 63567-1

General information

10.99 New project approved   Apr 22, 2024

CENELEC

CLC/TC 47X

European Norm

31.080.99   Other semiconductor devices

Life cycle

NOW

IN_DEVELOPMENT
prEN IEC 63567-1
10.99 New project approved
Apr 22, 2024