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prEN IEC 62047-55

Semiconductor devices - Micro-electromechanical devices - Part 55: Silicon based MEMS fabrication technology - Test method of microstructure pendulum impact prEN IEC 62047-55

General information

30.98   Project deleted   Feb 17, 2025

CENELEC

CLC/SR 47F Micro-electromechanical systems

European Norm

31.080.99   Other semiconductor devices

Life cycle

NOW

ABANDON
prEN IEC 62047-55
30.98 Project deleted
Feb 17, 2025




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