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PNW 47f-5 ED1

Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for linear thermal expansion coefficients of MEMS materials (Future IEC 62047-11)

General information

10.98   New project rejected   Jun 26, 2009

IEC

TC 47/SC 47F

International Standard

Life cycle

NOW

ABANDON
PNW 47f-5 ED1
10.98 New project rejected
Jun 26, 2009