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PNW 47F-140 ED1

Semiconductor devices - Micro-electromechanical devices - Part 24: Silicon-based MEMS fabrication technology - Basic regulation for layout design

General information

10.98   New project rejected   Apr 30, 2013

IEC

TC 47/SC 47F

International Standard

Life cycle

NOW

ABANDON
PNW 47F-140 ED1
10.98 New project rejected
Apr 30, 2013