60.60 Standard published Feb 20, 2025
ISO
ISO/TC 201/SC 8 Glow discharge spectroscopy
Technical Specification
71.040.40 Chemical analysis
This document specifies a glow discharge optical emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.
This method is applicable to oxide films 5 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.
WITHDRAWN
ISO/TS 25138:2019
PUBLISHED
ISO/TS 25138:2025
60.60
Standard published
Feb 20, 2025