ISO/NP 26897

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating pixel size on digital image of SEM and FIB-SEM ISO/NP 26897

Scope

This document specifies a method for calibrating the pixel size and FOV of digital images acquired using an SEM and an FIB-SEM, by employing an appropriate reference material. The applicable range of pixel size and FOV is limited by the structural dimensions available in the reference material used for calibration.