ISO/AWI 25363

Determination of fracture toughness of PVD coatings by micropillar indentation method

Scope

This document describes the test method and procedure for the determination of fracture toughness of the physical vapor deposition (PVD) coatings. The test method uses indentation on micropillars fabricated by different techniques, including focused ion beam (FIB) milling, photolithography, and femtosecond laser processing.This test method is applicable to ceramic coatings produced by the PVD technique.