ISO/CD 25164

Physical vapor deposition coatings — Magnetron sputtering deposition of TiAlSiN thin films — Specification

Current stage: 30.20 CD study/ballot initiated Oct 13, 2024

Originator: ISO

Owner: ISO/TC 107/SC 9 Physical vapor deposition coatings

Type: International Standard

This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering.

IN_DEVELOPMENT
ISO/CD 25164
30.20 CD study/ballot initiated
Oct 13, 2024