ISO/AWI 25164

Physical vapor deposition coatings — Magnetron sputtering deposition of TiAlSiN thin films — Specification ISO/AWI 25164

Current stage: 20.00 New project registered in TC/SC work programme Jun 13, 2024

Originator: ISO

Owner: ISO/TC 107/SC 9 Physical vapor deposition coatings

Type: International Standard

This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering.

IN_DEVELOPMENT
ISO/AWI 25164
20.00 New project registered in TC/SC work programme
Jun 13, 2024