ISO/NP 19383

Atomic Layer Deposition-- Chemical characteristics and related process specifications of atomic layer deposition precursors ISO/NP 19383

General information

Current stage: 10.20 New project ballot initiated Feb 28, 2024

Originator: ISO

Owner: ISO/TC 107 Metallic and other inorganic coatings

Type: International Standard

Scope

This document describes the chemical characteristics and related process specifications of the atomic layer deposition precursors, including assay content, metal purity, and anion content specification.

Life cycle

NOW

IN_DEVELOPMENT
ISO/NP 19383
10.20 New project ballot initiated
Feb 28, 2024