ISO/NP 13060

Adhesion evaluation method for microcircuits in electronic components by scratch testing ISO/NP 13060

Scope

This International Standard describes a method for measuring adhesion strength between micro-pattern and substrates by scratching with a wedged-shape diamond stylus, since traditional adhesion test has the limitation that it is difficult to evaluate the adhesion of fine pattern coatings with a width less than several millimeters.

During the test, either a constant or progressive force normal to the surface is applied to the stylus. This yields adhesive and/or cohesive failures of the pattern coating-substrate system.

This test method is suitable for evaluating fine copper circuits up to a width of tens of micrometers and might also be suitable for evaluating fine patterns of other widths and materials. This international standard is intended for use in the macro (0,1 N to 30 N) force range. This procedure may also be applicable to other force ranges. However, appropriate calibration is required to quantify the normal forces at which failures occur.