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ISO/DIS 3556-1.2

Sputter-ion pumps — Measurement of performance characteristics — Part 1: Pumps with a volume rate of flow greater than 10 l/s

General information

40.98   Project deleted   Aug 6, 1996

ISO

ISO/TC 112 Vacuum technology

International Standard

23.160   Vacuum technology

Life cycle

NOW

ABANDON
ISO/DIS 3556-1.2
40.98 Project deleted
Aug 6, 1996