ISO/DIS 3556-1.2

Sputter-ion pumps — Measurement of performance characteristics — Part 1: Pumps with a volume rate of flow greater than 10 l/s ISO/DIS 3556-1.2

Current stage: 40.98 Project deleted Aug 6, 1996

Originator: ISO

Owner: ISO/TC 112 Vacuum technology

Type: International Standard

ICS: 23.160 Vacuum technology

ABANDON
ISO/DIS 3556-1.2
40.98 Project deleted
Aug 6, 1996

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